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SEMI P5-0416 (Reapproved 1221)
22 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauge
SEMI E143-0306 (Reapproved 0512)
optical profiling instruments that sample over a line or an array over an area of the surface
SEMI F78-0611 (technical revision)
MF008400 - SEMI MF84 - Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe Revision:SEMI MF84-02 - Superseded SEMI P5-0416 (Reapproved 1221)This Test Method covers the measurement of the resistivity of silicon wafers with an in line four point probe. This Test Method describes a procedure that enables inter laboratory comparisons of the room temperature resistivity of silicon wafers. The precision that can be expected depends on both the resistivity of the wafer and on the homogeneity of the wafer. Round robin tests have been conducted to establish the expected precision for measurements